August Technology Corp. today introduced the AXi series of automated wafer inspection tools designed to be utilized in front end wafer fabs detecting defects 0.5 microns in size and larger “The AXi's ...
Unpatterned wafer inspection, which has flown well under the radar for most of the semiconductor industry, is becoming more critical amid the need to find defects earlier in the manufacturing process ...
The wafer inspection business is heating up as chipmakers encounter new and tiny killer defects in advanced devices. Last month ASML Holding entered into an agreement to acquire Hermes Microvision ...
SAN JOSE — KLA-Tencor Corp. here today announced a new, in-line automatic defect classification (iADC) capability for its eS20XP electron-beam wafer inspection system. KLA-Tencor's e-beam wafer ...
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